Laser micro machining of 3C–SiC single crystals

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Laser micro machining of 3C–SiC single crystals

Sandra Zoppel, Maria Farsari, Robert Merz, Johann Zehetner, Günther Stangl, Georg A. Reider, Costas Fotakis
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Volume:
83
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2006.01.064
File:
PDF, 135 KB
english, 2006
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