Electron range effects in focused electron beam induced deposition of 3D nanostructures
Tristan Bret, Ivo Utke, Patrik Hoffmann, Maurice Abourida, Pascal DoppeltVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.01.146
File:
PDF, 395 KB
english, 2006