Layer-by-layer UV micromachining methodology of epoxy...

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Layer-by-layer UV micromachining methodology of epoxy resist embedded microchannels

M. Kitsara, M. Chatzichristidi, D. Niakoula, D. Goustouridis, K. Beltsios, P. Argitis, I. Raptis
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Volume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.157
File:
PDF, 339 KB
english, 2006
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