Lithographic manufacturing robustness analysis for as drawn...

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Lithographic manufacturing robustness analysis for as drawn patterns

Lawrence S. Melvin III, Qiliang Yan, William F. Kielhorn
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Volume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.01.243
File:
PDF, 179 KB
english, 2006
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