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Direct pattern transfer for sub-45 nm features using nanoimprint lithography
Ngoc V. Le, William J. Dauksher, Kathy A. Gehoski, Kevin J. Nordquist, Eric Ainley, Pawitter MangatVolume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.254
File:
PDF, 200 KB
english, 2006