High-aspect-ratio structure formation techniques for three-dimensional metal-oxide-semiconductor transistors
Hideo Sunami, Shunpei Matsumura, Koji Yoshikawa, Kiyoshi OkuyamaVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.01.270
File:
PDF, 650 KB
english, 2006