Exposure parameters for MeV proton beam writing on SU-8

Microelectronic Engineering 2006 Vol. 83; Iss. 10

Exposure parameters for MeV proton beam writing on SU-8

Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga Marrero, Marie Wegdén
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Volume:
83
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2006.04.001
File:
PDF, 476 KB
english, 2006
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