Scanning spreading resistance microscopy of defect...

Microelectronic Engineering 2007 Vol. 84; Iss. 3

Scanning spreading resistance microscopy of defect engineered low dose SIMOX samples

Lasse Vines, Reinhard Kögler, Andrej Yu. Kuznetsov
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.10.067
File:
PDF, 429 KB
english, 2007
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