![](/img/cover-not-exists.png)
A pixel-based regularization approach to inverse lithography
Amyn Poonawala, Peyman MilanfarVolume:
84
Year:
2007
Language:
english
Pages:
16
DOI:
10.1016/j.mee.2007.02.005
File:
PDF, 1.51 MB
english, 2007