Volume 84; Issue 12

Main
Microelectronic Engineering
Volume 84; Issue 12

Microelectronic Engineering

Volume 84; Issue 12

1

Erratum to: “Temperature effects of pad conditioning process on oxide CMP: Polishing pad, slurry characteristics, and surface reactions” [Microelect. Eng. 83 (2006) 362–370]

Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 251 KB

english, 2007

2

New materials of spin-on organic hardmask for sub-70 nm devices

Sang-Jun Choi, Chang-Il Oh, Dong-Seon Uh

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 724 KB

english, 2007

3

Dependence of electrical properties on interfacial layer of Ta2O5 films

Jae-Woong Lee, Moon-Ho Ham, Wan-Joo Maeng, Hyungjun Kim, Jae-Min Myoung

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 465 KB

english, 2007

4

Improved double-recessed 4H-SiC MESFETs structure with recessed source/drain drift region

Jinping Zhang, Xiaorong Luo, Zhaoji Li, Bo Zhang

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 481 KB

english, 2007

5

Controlling resist thickness and etch depth for fabrication of 3D structures in electron-beam grayscale lithography

J. Kim, D.C. Joy, S.-Y. Lee

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 427 KB

english, 2007

6

Fabrication of microfluidic channels derived from a UV/thermally cured preceramic polymer via a soft lithographic technique

Hong-Joo Lee, Tae-Ho Yoon, Dong-Pyo Kim

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 229 KB

english, 2007

7

Vertical poly-Si select pn-diodes for emerging resistive non-volatile memories

D.S. Golubović, A.H. Miranda, N. Akil, R.T.F. van Schaijk, M.J. van Duuren

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 323 KB

english, 2007

8

Acknowledgment of Reviewers 2007

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 50 KB

english, 2007

9

A study on the correlation between electrochemical corrosion and chemical mechanical polishing performance of W and Ti film

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.78 MB

english, 2007

10

MOS capacitors obtained by wet oxidation of n-type 4H–SiC pre-implanted with nitrogen

A. Poggi, F. Moscatelli, Y. Hijikata, S. Solmi, R. Nipoti

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 196 KB

english, 2007

11

Fabrication of SiO2 microdisk arrays for optics and light trapping experiments

L.V. Saraf, M.H. Engelhard, A.S. Lea

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 485 KB

english, 2007

12

Chemical mechanical planarization operation via dynamic programming

Chia-Shui Lin, Yung-Chou Lee

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 987 KB

english, 2007

13

A pixel-based regularization approach to inverse lithography

Amyn Poonawala, Peyman Milanfar

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.51 MB

english, 2007

14

Wavelet monitoring of spatial surface roughness for plasma diagnosis

Byungwhan Kim, Woo Suk Kim

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 427 KB

english, 2007

15

Dielectric constant of barium titanate/cyanoethyl ester of polyvinyl alcohol composite in comparison with the existing theoretical models

Ravikiran Kota, Ashraf F. Ali, Burtrand I. Lee, Maxim M. Sychov

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 132 KB

english, 2007

16

Statistical constraints in nanocrystal memory scaling

Riccardo Gusmeroli, Christian Monzio Compagnoni, Alessandro S. Spinelli

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 276 KB

english, 2007

17

The electrical characteristics of Sn/methyl-red/p-type Si/Al contacts

M.E. Aydın, A. Türüt

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 213 KB

english, 2007

18

Tuning the dielectric properties of hafnium silicate films

Christian Fachmann, Lothar Frey, Stephan Kudelka, Tim Boescke, Stefan Nawka, Elke Erben, Theodor Doll

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 720 KB

english, 2007

19

Integration of HfxTayN metal gate with SiO2 and HfOxNy gate dielectrics for MOS device applications

Chang-Ta Yang, Kuei-Shu Chang-Liao, Hsin-Chun Chang, B.S. Sahu, Tzu-Chen Wang, Tien-Ko Wang, Wen-Fa Wu

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 647 KB

english, 2007

20

Lateral SbTeN based multi-layer phase change memory for multi-state storage

You Yin, Hayato Sone, Sumio Hosaka

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.30 MB

english, 2007

21

Evaluation of electrical and optical properties of indium tin oxide thin film using chemical mechanical polishing technique

Yong-Jin Seo, Gwon-Woo Choi, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 920 KB

english, 2007

22

Simulation and fabrication of high voltage AlGaN/GaN based Schottky diodes with field plate edge termination

K. Remashan, Wen-Pin Huang, Jen-Inn Chyi

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 303 KB

english, 2007

23

Inside Front Cover - Editorial Board

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 32 KB

english, 2007

24

Direct stamp fabrication for NIL and hot embossing using HSQ

N. Gadegaard, D. McCloy

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 704 KB

english, 2007

25

Effect of organic acids on copper chemical mechanical polishing

Yung-Fu Wu, Tzu-Hsuan Tsai

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 507 KB

english, 2007

26

Source/drain extension region engineering in nanoscale double gate SOI MOSFETs: Novel design methodology for low-voltage analog applications

Abhinav Kranti, G. Alastair Armstrong

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 273 KB

english, 2007

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Tor version

Z-Library

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски