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Evaluation of electrical and optical properties of indium tin oxide thin film using chemical mechanical polishing technique
Yong-Jin Seo, Gwon-Woo Choi, Woo-Sun LeeVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.03.005
File:
PDF, 920 KB
english, 2007