Fabrication of soft reflective microoptical elements using...

Microelectronic Engineering 2008 Vol. 85; Iss. 1

Fabrication of soft reflective microoptical elements using a replication process

Teng-Kai Shih, Jeng-Rong Ho, Jui-Hao Wang, Chia-Fu Chen, Chueh-Yang Liu, Chien-Chung Chen, Wha-Tzong Whang
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Volume:
85
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2007.05.003
File:
PDF, 751 KB
english, 2008
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