Impact of line-edge roughness on resistance and capacitance...

Impact of line-edge roughness on resistance and capacitance of scaled interconnects

M. Stucchi, M. Bamal, K. Maex
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Volume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.05.038
File:
PDF, 1003 KB
english, 2007
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