Stencil-assisted reactive ion etching for micro and nano patterning
B. Viallet, J. Grisolia, L. Ressier, M.A.F. Van Den Boogaart, J. Brugger, T. LebraudVolume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.04.027
File:
PDF, 1.32 MB
english, 2008