Impact of interface variations on J–V and C–V polarity...

Microelectronic Engineering 2009 Vol. 86; Iss. 7-9

Impact of interface variations on J–V and C–V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1−x)AlxO2 films

W. Weinreich, R. Reiche, M. Lemberger, G. Jegert, J. Müller, L. Wilde, S. Teichert, J. Heitmann, E. Erben, L. Oberbeck, U. Schröder, A.J. Bauer, H. Ryssel
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Volume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.03.070
File:
PDF, 619 KB
english, 2009
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