Effect of fluorine contamination on barrier metal oxidation
S. Ozaki, Y. Nakata, Y. Kobayashi, T. Nakamura, Y. Iba, S. Fukuyama, H. Watatani, Y. OhkuraVolume:
87
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.06.011
File:
PDF, 461 KB
english, 2010