Fabrication of sub-micron 3-D structure using duo-mold...

Microelectronic Engineering 2010 Vol. 87; Iss. 4

Fabrication of sub-micron 3-D structure using duo-mold UV-RIL process

Kang-Soo Han, Sung-Hoon Hong, Jun-Ho Jeong, Heon Lee
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Volume:
87
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.08.022
File:
PDF, 373 KB
english, 2010
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