Large-area nanoperforated SiN membranes for optical and...

Microelectronic Engineering 2010 Vol. 87; Iss. 5-8

Large-area nanoperforated SiN membranes for optical and mechanical filtering

J. Viheriälä, T. Niemi, J. Laukkanen, M. Karjalainen, M. Pessa
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Volume:
87
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.10.033
File:
PDF, 227 KB
english, 2010
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