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Suspended membranes, cantilevers and beams using SU-8 foils
J. Melai, V.M. Blanco Carballo, C. Salm, J. SchmitzVolume:
87
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.10.035
File:
PDF, 614 KB
english, 2010