![](/img/cover-not-exists.png)
Texture of atomic layer deposited ruthenium
J. Musschoot, Q. Xie, D. Deduytsche, K. De Keyser, D. Longrie, J. Haemers, S. Van den Berghe, R.L. Van Meirhaeghe, J. D’Haen, C. DetavernierVolume:
87
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.11.020
File:
PDF, 502 KB
english, 2010