Electron Beam Direct Writing technology for LSI prototyping business
Yasuhide Machida, Takashi Maruyama, Yoshinori Kojima, Shinji Sugatani, Haruo Tsuchikawa, Kozo Ogino, Hiromi HoshinoVolume:
87
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.11.037
File:
PDF, 370 KB
english, 2010