Development of a low temperature amorphous Si/Ti for integrated MEMS/NEMS
Liudi Jiang, G. Lewis, S.M. Spearing, N.M. Jennett, M. MonclusVolume:
87
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.11.039
File:
PDF, 1.70 MB
english, 2010