The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor deposition
Reo Kometani, Shin’ichi Warisawa, Sunao IshiharaVolume:
87
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.11.095
File:
PDF, 529 KB
english, 2010