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Thermal characterization of materials for double patterning
S. Derrough, A. Pikon, C. Sourd, I. Guérin, J. Simon, S. Gaugiran, T. Cardolaccia, Y. Liu, P. Trefonas, G. Barclay, Y.C. BaeVolume:
87
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.11.117
File:
PDF, 521 KB
english, 2010