Sub-micron imaging on high-topography wafers using spray...

Microelectronic Engineering 2010 Vol. 87; Iss. 5-8

Sub-micron imaging on high-topography wafers using spray coating and projection lithography

Pascale Maury, Jean-Marie Quemper, Stephane Pocas, Dick Van Vliet, Nico Noordam, Peter ten Berge, Keith Best
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Volume:
87
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.12.011
File:
PDF, 350 KB
english, 2010
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