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Inverse problem solving and optical index determination of resist films by ellipsometry
J.H. Tortai, A. Akbalik Rapine, S. Soulan, P. SchiavoneVolume:
87
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2009.12.023
File:
PDF, 464 KB
english, 2010