Influences of embossing technology on Pb(Zr0.3,Ti0.7)O3...

Microelectronic Engineering 2010 Vol. 87; Iss. 5-8

Influences of embossing technology on Pb(Zr0.3,Ti0.7)O3 ferroelectric thin film

Zhen-Kui Shen, Zhi-Hui Chen, Zhi-Jun Qiu, Bing-rui Lu, Jing Wan, Shao-Ren Deng, An-Quan Jiang, Xin-Ping Qu, Ran Liu, Yifang Chen
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Volume:
87
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.12.049
File:
PDF, 456 KB
english, 2010
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