Ge volatilization products in high-k gate dielectrics
E. Golias, L. Tsetseris, A. Dimoulas, S.T. PantelidesVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.07.041
File:
PDF, 998 KB
english, 2011