H2S molecular beam passivation of...

Microelectronic Engineering 2011 Vol. 88; Iss. 4

H2S molecular beam passivation of Ge(0 0 1)

C. Merckling, Y.C. Chang, C.Y. Lu, J. Penaud, M. El-Kazzi, F. Bellenger, G. Brammertz, M. Hong, J. Kwo, M. Meuris, J. Dekoster, M.M. Heyns, M. Caymax
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.09.012
File:
PDF, 631 KB
english, 2011
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