Contact to contacts or silicide by use of backside FIB...

Microelectronics Reliability 2006 Vol. 46; Iss. 9-11

Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node

R. Schlangen, P. Sadewater, U. Kerst, C. Boit
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Volume:
46
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2006.07.025
File:
PDF, 10.33 MB
english, 2006
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