FinFET and MOSFET preliminary comparison of gate oxide...

Microelectronics Reliability 2006 Vol. 46; Iss. 9-11

FinFET and MOSFET preliminary comparison of gate oxide reliability

R. Fernández, R. Rodríguez, M. Nafría, X. Aymerich, B. Kaczer, G. Groeseneken
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Volume:
46
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2006.07.043
File:
PDF, 286 KB
english, 2006
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