Charging of radiation induced defects in RF MEMS dielectric films
M. Exarchos, E. Papandreou, P. Pons, M. Lamhamdi, G.J. Papaioannou, R. PlanaVolume:
46
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2006.07.045
File:
PDF, 825 KB
english, 2006