Reliability and failure in single crystal silicon MEMS...

Microelectronics Reliability 2008 / 8 Vol. 48; Iss. 8-9

Reliability and failure in single crystal silicon MEMS devices

Neels, A., Dommann, A., Schifferle, A., Papes, O., Mazza, E.
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Volume:
48
Language:
english
Pages:
3
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.018
Date:
August, 2008
File:
PDF, 571 KB
english, 2008
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