Reliability study of TaON capacitors: From leakage current...

Microelectronics Reliability 2008 / 8 Vol. 48; Iss. 8-9

Reliability study of TaON capacitors: From leakage current characterization to ESD robustness prediction

Verchiani, M., Bouyssou, E., Fiannaca, G., Cantin, F., Anceau, C., Ranson, P.
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Volume:
48
Language:
english
Pages:
5
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.032
Date:
August, 2008
File:
PDF, 296 KB
english, 2008
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