Effect of physical defect on shmoos in CMOS DSM...

Microelectronics Reliability 2008 / 8 Vol. 48; Iss. 8-9

Effect of physical defect on shmoos in CMOS DSM technologies

Machouat, A., Haller, G., Goubier, V., Lewis, D., Perdu, P., Pouget, V., Fouillat, P., Essely, F.
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Volume:
48
Language:
english
Pages:
6
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.043
Date:
August, 2008
File:
PDF, 1.91 MB
english, 2008
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