Kelvin probe microscopy for reliability investigation of...

Microelectronics Reliability 2008 / 8 Vol. 48; Iss. 8-9

Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches

Belarni, A., Lamhamdi, M., Pons, P., Boudou, L., Guastavino, J., Segui, Y., Papaioannou, G., Plana, R.
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Volume:
48
Language:
english
Pages:
5
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.046
Date:
August, 2008
File:
PDF, 680 KB
english, 2008
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