Improvement of immunity on MeV electron radiation of MOS structures by means of ultra-shallow fluorine implantation
Małgorzata Kalisz, Robert Mroczyński, Romuald B. BeckVolume:
51
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2011.02.014
File:
PDF, 596 KB
english, 2011