Self-assembly La-rich nanocrystals in metal-gate MIS...

Microelectronic Engineering 2015 / 04 Vol. 138

Self-assembly La-rich nanocrystals in metal-gate MIS structures for non-volatile memories

Juan, Pi-Chun, Wang, Jyh-Liang, Hsieh, Tsang-Yen, Lin, Cheng-Li, Yang, Chia-Ming, Shye, Der-Chi, Liao, Shu-Chuan
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Volume:
138
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.01.026
Date:
April, 2015
File:
PDF, 1.00 MB
english, 2015
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