A comparative study on ultra-shallow junction formation using co-implantation with fluorine or carbon in pre-amorphized silicon
Houda Graoui, Majeed A. FoadVolume:
124-125
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2005.08.040
File:
PDF, 223 KB
english, 2005