![](/img/cover-not-exists.png)
Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing
W. Lerch, S. Paul, J. Niess, S. McCoy, J. Gelpey, F. Cristiano, F. Severac, P. Fazzini, A. Martinez-Limia, P. Pichler, H. Kheyrandish, D. BolzeVolume:
154-155
Year:
2008
Language:
english
Pages:
11
DOI:
10.1016/j.mseb.2008.08.017
File:
PDF, 2.06 MB
english, 2008