Seed layer corrosion of Damascene structures in copper...

Materials Science in Semiconductor Processing 2003 Vol. 6; Iss. 4

Seed layer corrosion of Damascene structures in copper sulfate electrolytes

Nicholas M. Martyak, Pierre Ricou
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Volume:
6
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/j.mssp.2003.09.002
File:
PDF, 587 KB
english, 2003
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