Fabrication and Initial Characterization of 4H-SiC Epilayer...

Materials Science Forum 2002 Vol. 389-393

Fabrication and Initial Characterization of 4H-SiC Epilayer Channel MOSFETs

Imaizumi, Masayuki, Tarui, Yoichiro, Sugimoto, Hiroshi, Ohtsuka, Ken Ichi, Takami, Tetsuya, Ozeki, Tatsuo
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.1203
File:
PDF, 321 KB
2002
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