Anisotropic Elastic Properties of Low-k Dielectric...

MRS Proceedings 2004 / 1 Vol. 812

Anisotropic Elastic Properties of Low-k Dielectric Materials

Maznev, A.A., Mazurenko, A., Alper, G., Moore, C.J.L., Gostein, M., Schulberg, Michelle T., Humayun, Raashina, Sengupta, Archita, Sun, Jia-Ning
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
812
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-812-F5.9
Date:
January, 2004
File:
PDF, 226 KB
english, 2004
Conversion to is in progress
Conversion to is failed