The Build-Up of Strain Fields in Czochralski-Si Observed in...

The Build-Up of Strain Fields in Czochralski-Si Observed in Real Time by High Energy X-Ray Diffraction

Stockmeier, Matthias, Weisser, Matthias, Hock, Rainer, Magerl, Andreas
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.631
File:
PDF, 1.11 MB
english, 2005
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