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Gettering Induced by Helium Implantation: Application to a Device
Roqueta, F., Alquier, Daniel, Ventura, Laurent, Lopez, B.Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.82-84.279
File:
PDF, 575 KB
2002