Laser Assisted Formation on Nanocrystals in Plasma-Chemical...

Solid State Phenomena 2005 Vol. 108-109

Laser Assisted Formation on Nanocrystals in Plasma-Chemical Deposited SiNx Films

Arzhannikova, Sofia A., Efremov, M.D., Volodin, V.A., Kamaev, G.N., Marin, D.V., Soldatenkov, S.A., Shevchuk, V.S., Kochubei, S.A., Popov, A.A., Minakov, Yu. A.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.53
File:
PDF, 384 KB
english, 2005
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