Observation of 2in SiC Wafer by SWBXT at SPring-8
Sasaki, Makato, Hirai, Akira, Miyanagi, Toshiyuki, Furusho, Tomoaki, Nishiguchi, Taro, Shiomi, Hiromu, Nishino, ShigehiroVolume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.411
File:
PDF, 402 KB
2002