Selective Wet Etching of High-k Gate Dielectrics

Solid State Phenomena 2003 Vol. 92

Selective Wet Etching of High-k Gate Dielectrics

Christenson, Kurt K., Schwab, Brent, Wagener, Thomas J., Rosengren, Bruce, Riley, Deborah J., Barnett, Joel
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Volume:
92
Year:
2003
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.92.129
File:
PDF, 262 KB
2003
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