Intrinsic Point Defects in Silicon: a Unified View from Crystal Growth, Wafer Processing and Metal Diffusion
Voronkov, Vladimir, Falster, RobertVolume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.108-109.1
File:
PDF, 330 KB
english, 2005