Electrical and Optical Characterization of Thin Semiconductor Layers for Advanced ULSI Devices
Simoen, Eddy, Claeys, C., Gaubas, Eugenijus, Rafí, J.M.Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.539
File:
PDF, 706 KB
english, 2005