Electrical and Optical Characterization of Thin...

Electrical and Optical Characterization of Thin Semiconductor Layers for Advanced ULSI Devices

Simoen, Eddy, Claeys, C., Gaubas, Eugenijus, Rafí, J.M.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.539
File:
PDF, 706 KB
english, 2005
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